Atmospheric glow discharges from the high-frequency to very high-frequency bands
نویسندگان
چکیده
منابع مشابه
Origins of atmospheric contamination in amorphous silicon prepared by very high frequency [70 MHz] glow discharge
The authors have studied the effect of plasma power, reactor outgassing rates, and of silane purity on the oxygen, carbon, and nitrogen contents of amorphous silicon material prepared by the very high frequency ~70 MHz! glow discharge technique. The silane purity could be optionally enhanced by the application of a getter-based silane gas purifier. It was found that oxygen incorporation was enh...
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 2008
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.3052857